This practical book covers the mechanical, electrical, chemical, and optical properties of microelectronic materials, and analyzes the interactions of these properties. Because it describes how new materials are being designed to meet requirements for microelectronic components and devices, the text can provide the reader with helpful information on designing new materials for specific applications. The authors emphasize understanding the phase chemistry of semiconductor and metal systems, to ensure the long-term stability of devices and systems. This book is ideal for senior undergraduate and graduate students and researchers, in physics, electronic engineering and materials science.